Search results for "Amine solvent"

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Optical grating recording in ChG thin film by electron beam

2013

Abstract Recording capabilities of As Se S chalcogenide (ChG) glasses using electron beam (EB) lithography have been investigated in this study. After exposure with EB the thin films of these inorganic glasses can be etched in alkaline amine solvent with high selectivity. High resolution, smooth shaped structures have been fabricated using ChG thin films. Height of developed pattern can be controlled through changing applied electron dose.

Materials scienceChalcogenidebusiness.industryfungiHigh selectivityAmine solventfood and beveragesHigh resolutionCondensed Matter PhysicsElectronic Optical and Magnetic Materialschemistry.chemical_compoundOpticschemistryMaterials ChemistryCeramics and CompositesCathode raysense organsThin filmbusinessLithographyDiffraction gratingJournal of Non-Crystalline Solids

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